Diffusion practice problems
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Read the Diffusion example calculations class notes.
Boron is diffused into a silicon wafer using a two-step process. The process parameters are:
- deposition temperature: T1 = 900°C
- deposition time: t1 = 95 min
- drive temperature: T2 = 1100°C
- drive time: t2 = 90 min.
The wafer has a constant background doping of NB = 1x1016 cm–3.
The surface concentration during the depositon step is determined by the solid-solubility limit.
For this diffusion use Ns = 1x1020 cm–3.