Topics
(Click each link below to expand the text. Click again to collapse it.)
Safety
History / processes / simulation
- CMOS and Moore's law
- (semi)modern CMOS process
- MEMS process
- CyMOS
- cleanliness
- SUPREM tutorial
Oxidation
Lithography
- litho & etching overview
- lithography systems
- photoresists
- advanced techniques
Doping
- Review: donor and acceptors (from EE 230)
- diffusion
- diffusion details
- diffusion example problems
- diffusion practice problems
- calculators: constant-source, constant-dose, two-step
- error function table
- Review: conductivity
- resistance measurements
- resistance practice problems
- Ion Implantation
- Implant example problems
- implant practice problems
Thin films
- Review of classical gas theory; vacuum systems; plasmas
- Surface mobility and film formation
- Evaporation
- Sputtering
- CVD
- plasma etching
Contacts and interconnects
- Ohmic contacts to silicon
- TLM measurements | TLM practice problems
- inter-layer connections (vias)
- interconnects and dielectrics
- Chemical-mechanical polishing
- copper technology
Review of device characteristics
- diode review
- BJT review
- MOSFET review